Conversion of strain state from biaxial to uniaxial in strained silicon

  • Fei Ma, Tian-Wei Zhang, Ke-Wei Xu, Paul K. Chu
  • Applied Physics Letters, May 2011, American Institute of Physics
  • DOI: 10.1063/1.3589981

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http://dx.doi.org/10.1063/1.3589981

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