Elemental distribution and oxygen deficiency of magnetron sputtered indium tin oxide films

Annett Tho̸gersen, Margrethe Rein, Edouard Monakhov, Jeyanthinath Mayandi, Spyros Diplas
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3587174