Local stress induced by diamond-like carbon liner in AlGaN/GaN metal-oxide-semiconductor high-electron mobility transistors and impact on electrical characteristics

Xinke Liu, Bin Liu, Edwin Kim Fong Low, Wei Liu, Mingchu Yang, Leng-Seow Tan, Kie Leong Teo, Yee-Chia Yeo
  • Applied Physics Letters, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3584856