Comparison between chemical vapor deposited and physical vapor deposited WSi[sub 2] metal gate for InGaAs n-metal-oxide-semiconductor field-effect transistors

B. S. Ong, K. L. Pey, C. Y. Ong, C. S. Tan, D. A. Antoniadis, E. A. Fitzgerald
  • Applied Physics Letters, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3584024