Crystallized HfLaO embedded tetragonal ZrO[sub 2] for dynamic random access memory capacitor dielectrics

Yunsang Shin, Kyung Kyu Min, Seok-Hee Lee, Sung Kyu Lim, Jae Sub Oh, Kee-Jeung Lee, Kwon Hong, Byung Jin Cho
  • Applied Physics Letters, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3583590