Semiconductor-metal transition in thin VO2 films grown by ozone based atomic layer deposition

  • Geert Rampelberg, Marc Schaekers, Koen Martens, Qi Xie, Davy Deduytsche, Bob De Schutter, Nicolas Blasco, Jorge Kittl, Christophe Detavernier
  • Applied Physics Letters, April 2011, American Institute of Physics
  • DOI: 10.1063/1.3579195

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