Resonance effects in photoemission from TiO2-capped Mo/Si multilayer mirrors for extreme ultraviolet applications

Nadir S. Faradzhev, Boris V. Yakshinskiy, Elena Starodub, Theodore E. Madey, Shannon B. Hill, Steven Grantham, Thomas B. Lucatorto, Sergiy Yulin, Elio Vescovo, Jeffrey W. Keister
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3575319