Characterization of a low-pressure chlorine plasma column sustained by propagating surface waves using phase-sensitive microwave interferometry and trace-rare-gas optical emission spectroscopy

S. Mattei, O. Boudreault, R. Khare, L. Stafford, V. M. Donnelly
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3574658
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