Synthesis of SrTiO3 by crystallization of SrO/TiO2 superlattices prepared by atomic layer deposition

Jörg Neidhardt, Sören Jansen, Lutz Wilde, Jonas Sundqvist, Elke Erben, Steffen Teichert, Alexander Michaelis, Stefan Riedel
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3573513
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