A self-consistent global model of solenoidal-type inductively coupled plasma discharges including the effects of radio-frequency bias power

D. C. Kwon, W. S. Chang, M. Park, D. H. You, M. Y. Song, S. J. You, Y. H. Im, J.-S. Yoon
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3572264