Combined experimental and modeling studies of microwave activated CH4/H2/Ar plasmas for microcrystalline, nanocrystalline, and ultrananocrystalline diamond deposition

James C. Richley, Oliver J. L. Fox, Michael N. R. Ashfold, Yuri A. Mankelevich
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3562185