Improved electrical properties of Pt/HfO[sub 2]/Ge using in situ water vapor treatment and atomic layer deposition

In-Sung Park, Youngjae Choi, William T. Nichols, Jinho Ahn
  • Applied Physics Letters, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3562015
The author haven't yet claimed this publicationThe author haven't yet claimed this publication