Size dependent optical properties of Si quantum dots in Si-rich nitride/Si3N4 superlattice synthesized by magnetron sputtering

Yong-Heng So, Angus Gentle, Shujuan Huang, Gavin Conibeer, Martin A. Green
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3561439
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