Analytical electron microscopy investigation of elemental composition and bonding structure at the Sb-doped Ni-fully-silicide/SiO2 interface

Naohiko Kawasaki, Naoyuki Sugiyama, Yuji Otsuka, Hideki Hashimoto, Hiroki Kurata, Seiji Isoda
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3561370