Laser treatment of plasma-hydrogenated silicon wafers for thin layer exfoliation

Corneliu Ghica, Leona Cristina Nistor, Valentin Serban Teodorescu, Adrian Maraloiu, Sorin Vizireanu, Nae Doinel Scarisoreanu, Maria Dinescu
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3560538
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