Stabilization of ambient sensitive atomic layer deposited lanthanum aluminates by annealing and in situ capping

J. Swerts, S. Gielis, G. Vereecke, A. Hardy, D. Dewulf, C. Adelmann, M. K. Van Bael, S. Van Elshocht
  • Applied Physics Letters, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3557501