Effect of duty ratio of patterned surface on planarization by gas cluster ion beams

Hiroshi Tani, Yasuo Sakane, Isao Yamada, Masayuki Nakao, Tetsuya Hamaguchi, Keisuke Nagato, Noriaki Toyoda, Hiroki Naito
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3556783