n-type conductivity and phase transition in ultrananocrystalline diamond films by oxygen ion implantation and annealing

X. J. Hu, J. S. Ye, H. J. Liu, Y. G. Shen, X. H. Chen, H. Hu
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3556741
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