Tuning etch selectivity of fused silica irradiated by femtosecond laser pulses by controlling polarization of the writing pulses

Xiaoming Yu, Yang Liao, Fei He, Bin Zeng, Ya Cheng, Zhizhan Xu, Koji Sugioka, Katsumi Midorikawa
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3555080