Fabrication of uniform Ge-nanocrystals embedded in amorphous SiO[sub 2] films using Ge-ion implantation and neutron irradiation methods

Q. Chen, T. Lu, M. Xu, C. Meng, Y. Hu, K. Sun, I. Shlimak
  • Applied Physics Letters, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3553770