Origin of stress in radio frequency magnetron sputtered zinc oxide thin films

Rashmi Menon, Vinay Gupta, H. H. Tan, K. Sreenivas, C. Jagadish
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3552928
The author haven't yet claimed this publicationThe author haven't yet claimed this publication