Hard x-ray nano patterning using a sectioned multilayer

In Hwa Cho, Jae Myung Kim, Hanfei Yan, Ray Conley, Chian Liu, Albert T. Macrander, Jörg Maser, G. Brian Stephenson, Hyon Chol Kang, Do Young Noh, Su Yong Lee
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3552589
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