Sub-100 μm scale on-chip inductors with CoZrTa for GHz applications

Wei Xu, Hao Wu, Donald S. Gardner, Saurabh Sinha, Tawab Dastagir, Bertan Bakkaloglu, Yu Cao, Hongbin Yu
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3549594