Observation of pressure gradient and related flow rate effect on the plasma parameters in plasma processing reactor

Hyo-Chang Lee, Aram Kim, Se Youn Moon, Chin-Wook Chung
  • Physics of Plasmas, February 2011, American Institute of Physics
  • DOI: 10.1063/1.3546011
The author haven't yet claimed this publicationThe author haven't yet claimed this publication