Fabrication of midinfrared quantum cascade laser via oxygen-enhanced nonselective wet thermal oxidation

C. S. Seibert, M. D’Souza, J. C. Shin, L. J. Mawst, D. Botez, D. C. Hall
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3544489