Stress reduction and performance improvement of phase change memory cell by using Ge[sub 2]Sb[sub 2]Te[sub 5]–TaO[sub x] composite films

Sannian Song, Zhitang Song, Liangcai Wu, Bo Liu, Songlin Feng
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3544432