Influence of annular magnet on discharge characteristics in enhanced glow discharge plasma immersion ion implantation

Liu He Li, Zhuo Wang, Qiu Yuan Lu, En Jing Pang, Dan Dan Dun, Fu Shun He, Fen Li, Ricky K. Y. Fu, Paul K. Chu
  • Applied Physics Letters, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3537962
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