Formation and annealing of dislocation loops induced by nitrogen implantation of ZnO

Guillaume Perillat-Merceroz, Patrice Gergaud, Pascal Marotel, Stephane Brochen, Pierre-Henri Jouneau, Guy Feuillet
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3537917
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