Composition and strain in thin Si[sub 1−x]Ge[sub x] virtual substrates measured by micro-Raman spectroscopy and x-ray diffraction

T. S. Perova, J. Wasyluk, K. Lyutovich, E. Kasper, M. Oehme, K. Rode, A. Waldron
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3536508
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