Ultrasmooth growth of amorphous silicon films through ion-induced long-range surface correlations

  • A. Redondo-Cubero, R. Gago, L. Vázquez
  • Applied Physics Letters, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3535612

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http://dx.doi.org/10.1063/1.3535612

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