Microdischarge extreme ultraviolet source with alkali metal vapor for surface morphology application

Takeshi Higashiguchi, Hiromitsu Terauchi, Takamitsu Otsuka, Mami Yamaguchi, Keisuke Kikuchi, Noboru Yugami, Toyohiko Yatagai, Wataru Sasaki, Rebekah D’Arcy, Padraig Dunne, Gerry O’Sullivan
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3528165