A quantitative model for doping contrast in the scanning electron microscope using calculated potential distributions and Monte Carlo simulations

Augustus K. W. Chee, Ronald F. Broom, Colin J. Humphreys, Eric G. T. Bosch
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3524186
The author haven't yet claimed this publicationThe author haven't yet claimed this publication