Evolution of the plasma composition of a high power impulse magnetron sputtering system studied with a time-of-flight spectrometer

Efim Oks, André Anders
  • Journal of Applied Physics, May 2009, American Institute of Physics
  • DOI: 10.1063/1.3125443
The author haven't finished explaining this publicationThe author haven't finished explaining this publication
Read Publication

http://dx.doi.org/10.1063/1.3125443

The following have contributed to this page: Professor Andre Anders