Plasma “anti-assistance” and “self-assistance” to high power impulse magnetron sputtering

André Anders, Georgy Yu. Yushkov
  • Journal of Applied Physics, April 2009, American Institute of Physics
  • DOI: 10.1063/1.3097390

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http://dx.doi.org/10.1063/1.3097390

The following have contributed to this page: Professor Andre Anders