Interference lithography by a soft x-ray laser beam: Nanopatterning on photoresists

A. Ritucci, A. Reale, P. Zuppella, L. Reale, P. Tucceri, G. Tomassetti, P. Bettotti, L. Pavesi
  • Journal of Applied Physics, January 2007, American Institute of Physics
  • DOI: 10.1063/1.2764244
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The following have contributed to this page: Professor lorenzo pavesi and Dr Paolo Bettotti