Filtered cathodic arc deposition with ion-species-selective bias

André Anders, Nitisak Pasaja, Sakon Sansongsiri
  • Review of Scientific Instruments, June 2007, American Institute of Physics
  • DOI: 10.1063/1.2745229
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http://dx.doi.org/10.1063/1.2745229

The following have contributed to this page: Professor Andre Anders