Magnetic field effect on the sheath thickness in plasma immersion ion implantation

M. Keidar, O. R. Monteiro, A. Anders, I. D. Boyd
  • Frontiers in Human Neuroscience, August 2002, American Institute of Physics
  • DOI: 10.1063/1.1499516
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http://dx.doi.org/10.1063/1.1499516

The following have contributed to this page: Professor Andre Anders