Vacuum arc ion source with filtered plasma for macroparticle‐free implantation

Simone Anders, André Anders, Ian G. Brown, Robert A. MacGill, Michael R. Dickinson
  • Review of Scientific Instruments, April 1994, American Institute of Physics
  • DOI: 10.1063/1.1144997

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http://dx.doi.org/10.1063/1.1144997

The following have contributed to this page: Professor Andre Anders