What is it about?
In thin LiNbO3 platelet the fundamental thickness shear wave resonances can be excited by lateral electric field if the cut of LN is correctly chosen. We propose a new device which has 500nm wide electrodes on the platelet surface, separated by 3um to 5um gaps. Just in the region of these gaps the resonances are excited.
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Why is it important?
1. The wafers with thin LN layer are commercially available. 2. The resonance frequrncy is determined by the platelet thickness; the electrode width can be rather large, its influence on the resonance frequency is small. The device can work at 5 GHz fr. range being comfortabally produced with standard optical lithography. Critical dimensions (CD) >=0.5 um. It opens road to filters for 5G phomes. 3. Simulated device have excellent Q-factor >1000 at 5 GHz, and huge piezo-coupling
Perspectives
We have experimental confirmation that the idea works. With corresponding technology we will be able to produce deices for 3Ghz-&GHz frequency range (and up to 15 GHz) with optical photo-lithography.
Victor Plessky
GVR Trade SA
Read the Original
This page is a summary of: 5 GHz laterally-excited bulk-wave resonators (XBARs) based on thin platelets of Lithium Niobate, Electronics Letters, November 2018, the Institution of Engineering and Technology (the IET),
DOI: 10.1049/el.2018.7297.
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