Effects of isopropyl alcohol and acetic acid on surface roughness of Z-cut quartz etched by ammonium bifluoride solution

• Zhaoyun Zhang, Wei Su, Bin Tang, Wei Xu, Zhuang Xiong, Yang Gao, Bo Peng

• Micro & Nano Letters, June 2017, the Institution of Engineering and Technology (the IET)
• DOI: 10.1049/mnl.2017.0089