Effects of isopropyl alcohol and acetic acid on surface roughness of Z-cut quartz etched by ammonium bifluoride solution

  • Zhaoyun Zhang, Wei Su, Bin Tang, Wei Xu, Zhuang Xiong, Yang Gao, Bo Peng
  • Micro & Nano Letters, June 2017, the Institution of Engineering and Technology (the IET)
  • DOI: 10.1049/mnl.2017.0089

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http://dx.doi.org/10.1049/mnl.2017.0089