What is it about?
Low k dielectrics are prone to attack by moisture which raises their dielectric constant. The new method protects the low k dielectrics by converting surface silanol groups to Surface alkyl groups.
Featured Image
Why is it important?
Low k dielectrics are routinely employed in interconnects commonly used in contemporary computer chips. Maintaining low is essential for high speed operations.
Read the Original
This page is a summary of: A method to derivatize surface silanol groups to Si-alkyl groups in carbon-doped silicon oxides, RSC Advances, January 2016, Royal Society of Chemistry,
DOI: 10.1039/c6ra20355h.
You can read the full text:
Contributors
The following have contributed to this page
