What is it about?
A simple, novel way to mass fabricate ultrathin silicon nanowire
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Why is it important?
We report a new and controlled top-down fabrication process to prepare locally thinned down silicon nanowire field-effect devices at wafer-scale.
Perspectives
This novel fabrication process provides an alternative route for the fast and reliable preparation of ultrathin silicon nanostructures that can be easily integrated into nanodevices.
Dr Duy Phu Tran
University of South Australia
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This page is a summary of: Fabrication of locally thinned down silicon nanowires, Journal of Materials Chemistry C, January 2014, Royal Society of Chemistry,
DOI: 10.1039/c4tc00046c.
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