Density functional theory study on the full ALD process of silicon nitride thin film deposition via BDEAS or BTBAS and NH3

Liang Huang, Bo Han, Bing Han, Agnes Derecskei-Kovacs, Manchao Xiao, Xinjian Lei, Mark L. O'Neill, Ronald M. Pearlstein, Haripin Chandra, Hansong Cheng
  • Physical Chemistry Chemical Physics, July 2014, Royal Society of Chemistry
  • DOI: 10.1039/c4cp02741h

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http://dx.doi.org/10.1039/c4cp02741h

The following have contributed to this page: Professor Hansong Cheng