Decomposition of hexamethyldisilane on a hot tungsten filament and gas-phase reactions in a hot-wire chemical vapor deposition reactor

Yujun Shi, Xinmao Li, Ling Tong, Rim Toukabri, Brett Eustergerling
  • Physical Chemistry Chemical Physics, January 2008, Royal Society of Chemistry
  • DOI: 10.1039/b718743b

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http://dx.doi.org/10.1039/b718743b

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