Growth of gallium oxide thin films from gallium acetylacetonate by atomic layer epitaxy

  • Minna Nieminen, Lauri Niinistö, Eero Rauhala
  • Journal of Materials Chemistry, January 1996, Royal Society of Chemistry
  • DOI: 10.1039/jm9960600027

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http://dx.doi.org/10.1039/jm9960600027

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