Atomic layer deposition-based tuning of the pore size in mesoporous thin films studied by in situ grazing incidence small angle X-ray scattering

  • Jolien Dendooven, Kilian Devloo-Casier, Matthias Ide, Kathryn Grandfield, Mert Kurttepeli, Karl F. Ludwig, Sara Bals, Pascal Van Der Voort, Christophe Detavernier
  • Nanoscale, October 2014, Royal Society of Chemistry
  • DOI: 10.1039/c4nr05049e

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