Bonding of glass nanofluidic chips at room temperature by a one-step surface activation using an O2/CF4 plasma treatment

Yan Xu, Chenxi Wang, Lixiao Li, Nobuhiro Matsumoto, Kihoon Jang, Yiyang Dong, Kazuma Mawatari, Tadatomo Suga, Takehiko Kitamori
  • Lab on a Chip, January 2013, Royal Society of Chemistry
  • DOI: 10.1039/c3lc41345d
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