Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration

Yang Liao, Ya Cheng, Changning Liu, Jiangxin Song, Fei He, Yinglong Shen, Danping Chen, Zhizhan Xu, Zhichao Fan, Xunbin Wei, Koji Sugioka, Katsumi Midorikawa
  • Lab on a Chip, January 2013, Royal Society of Chemistry
  • DOI: 10.1039/c3lc41171k