Nanopatterning by ion implantation through nanoporous alumina masks

Wei Guan, Ian M. Ross, Umananda M. Bhatta, Jay Ghatak, Nianhua Peng, Beverley J. Inkson, Günter Möbus
  • Physical Chemistry Chemical Physics, January 2013, Royal Society of Chemistry
  • DOI: 10.1039/c3cp50196e