ALD/MLD of novel layer-engineered Zn-based inorganic–organic hybrid thin films using heterobifunctional 4-aminophenol as an organic precursor

Anjali Sood, Pia Sundberg, Maarit Karppinen
  • Dalton Transactions, January 2013, Royal Society of Chemistry
  • DOI: 10.1039/c2dt32630b